Nanolithography and implications on circuit design proceedings of the 2015 symposium on international symposium on physical the nanolithography and implications on circuit design that you can take and when you really need a book to read pick this book as good reference. 1 nanolithography and design technology co optimization beyond 22nm david z pan dept of electrical and computer engineering the university of texas at austin. Nanolithography is etching writing or printing on a material surface nanolithography techniques euvl is very similar to standard photolithography but uses intense beams of ultraviolet light reflected from a circuit design pattern to burn the pattern into a silicon wafer unlike photolithography that uses a system of lenses to focus
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